D. Berko (2014) “Using the Effect of Mechanical Stress on Doped Silicon as an Angular Movement Sensor for MOEMS/MEMS Micro Mirrors”, Global Journals of Research in Engineering, 14(F5), pp. 15–18. Available at: https://engineeringresearch.org/index.php/GJRE/article/view/1112 (Accessed: 2 May 2024).