@incollection{,
	
					
					
					836DABC27746A52953FD6C7ECA38593B
				,
	author={{D.Berko} and {Tel Aviv University}},
	journal={{Global Journal of Researches in Engineering}},
	journal={{GJRE}}2249-45960975-586110.34257/gjre,
	address={Cambridge, United States},
	publisher={Global Journals Organisation}1451518
}

@book{b0,
	
	
		,
	title={{The Science and Engineering of Microelectronic Fabrication}}
		,
	author={{
			AStephen
		} and {
			Campbell
		}}
		
		
			
			,
	address={Oxford}
		
	
	,
	note={2nd edition}

}

@book{b1,
	
	
		,
	title={{The MEMS Handbook}}
		,
	author={{
			MohamedGad-El-Hak
		}}
		
			
		
		
			University of Notre Dame
		
	

}

@incollection{b2,
	
	
		,
	title={{Microengineering, MEMS, and Interfacing: A Practical Guide}}
		,
	author={{
			DannyBanks
		}}
	
	
		,
	journal={{Mechanical Engineering)}}
		
			
		
	

}

@book{b3,
	
	
		,
	title={{Darling / EE-527, EE-527: Micro Fabrication Photolithography}}
		,
	author={{
			RB
		}}
		
			
		
	

}

@incollection{b4,
	
	
		,
	title={{Piezoresistivity Theory and Application}}
		,
	author={{
			.ADr
		} and {
			Amin
		}}
		
		
	
	
		,
	booktitle={{Presentation for the IEEE-Ultrasonics}}
				
	

}

@incollection{b5,
	
	
		,
	title={{Wheatstone Bridges Tutorial}}
		,
	author={{
			AdrianWatt
		}}
	
	
		,
	booktitle={{Absorb Physics for A -Level}}
				
	

}

@incollection{b6,
	
	
		,
	title={{Analog Devices Seminar Sensor Signal Conditioning}}
		,
	author={{
			WaltKester
		}}
		1-4.14
	
	
		,
	booktitle={{Section 4: Strain, Force, Pressure, and Flow}}
				
	

}

@book{b7,
	
	
		,
	title={{Direct Integration (DI) of Solid State Stress Sensors with Integrated Displacement Sensing}}
		,
	author={{
			DanHaronian
		}}
		5194-0/99
		
			,
	year={1999}
			,
	publisher={IEEE}
			
		
		
			Department of Interdisciplinary Studies, Faculty of Engineering, Tel-Aviv University
		
	

}

@book{b8,
	
	
		,
	title={{PI Force Control of a Microgripper for Assembling Biomedical Micro devices}}
		,
	author={{
			AEisinberg
		} and {
			AMenciassi
		} and {
			SMicera
		} and {
			DCampolo
		} and {
			MCCarrozza
		} and {
			PDario
		}}
		
		
		
		
		
		
	

}

@incollection{b9,
	
	
		,
	title={{Towards a Force-Controlled Microgripper For Assembling Biomedical Micro devices}}
		,
	author={{
			MariaChiara Carrozza
		} and {
			AnnaEisinberg
		} and {
			AriannaMenciassi
		} and {
			DomenicoCampolo
		} and {
			SilvestroMicera
		} and {
			PaoloDario
		}}
		
		
		
		
		
	
	
		,
	journal={{J. Micromech. Microeng}}
		
			10
			
			,
	year={2000}
		
	

}

@book{b10,
	
	
		,
	title={{Standard CMOS Piezoresistive Sensor to Quantify Heart Cell Contractile Forces}}
		,
	author={{
			GiselaLin
		} and {
			KristoferS JPister
		} and {
			KennethPRoos
		}}
		
		
		0-7803- 2985-6/96
		
			,
	year={1996}
			,
	publisher={IEEE}
			
		
	

}

@incollection{b11,
	
	
		,
	title={{Piezoresistive cantilever as portable micro force calibration standard}}
		,
	author={{
			IngoBehrens
		} and {
			LutzDoering
		} and {
			ErwinPeiner
		}}
		
		
	
	
		,
	journal={{Journal of Micromechanics and Microengineering}}
		
			13
			
			,
	year={2003}
		
		
			Technische Universit¨at Carolo-Wilhelmina zu Braunschweig
		
	
	,
	note={J. Micromech. Microeng.}

}

@incollection{b12,
	
	
		,
	title={{Flexible Angular Sensor}}
		,
	author={{
			RomainRoduit
		} and {
			Pierre-Andr´eBesse
		} and {
			IeeeMember
		} and {
			Jean-PaulMicallef
		}}
		
		
		
	
	
		,
	journal={{IEEE Transactions on Instrumentation and Measurement}}
		
			47
			4
			
			,
	year={AUGUST 1998}
		
	

}

@incollection{b13,
	
	
		,
	title={{Cantilever-Based Biosensors in CMOS Technology}}
		,
	author={{
			K.-UKirstein
		} and {
			YLi
		} and {
			MZimmermann
		} and {
			CVancura
		} and {
			TVolden
		} and {
			WHSong
		} and {
			JLichtenberg
		} and {
			AHierlemannn
		}}
		
		
		
		
		
		
		
		1530-1591/05
	
	
		,
	booktitle={{Switzerlan, Proceedings of the Design, Automation and Test in Europe Conference and Exhibition (DATE'05)}}
				
			,
	publisher={IEEE}
		
		
			Physical Electronics Laboratory, ETH Zurich
		
	

}

@book{b14,
	
	
		,
	title={{Mechanical Engineering Design}}
		,
	author={{
			JosephEdwardShigley
		} and {
			CharlesRMischke
		}}
		
		
			
			,
	address={McGraw Hill}
		
	
	,
	note={5th edition}

}

@incollection{b15,
	
	
		,
	title={{}}
	
	
		,
	journal={{Global Journal of Researches in Engineering}}
		
	

}